Electronic – division

They are divided into 3 categories:

1. Conventional laboratory premises with air conditioning with an area of ​​90 m².
2. Clean rooms with powerful air conditioning with a minimum cleanliness class of 1000 and temperature stabilization of ±3°C with an area of ​​65 m² (total area of ​​this part 112 m²).
3. Clean spaces with powerful air conditioning with a minimum cleanliness class of 1000 and a temperature stabilization of ±0.5°C with an area of ​​65 m². List of devices:
   – Among the unique and key facilities of the research and development infrastructure of the ÚI SAS are 2 electron lithographs with a variable cross-section of the electron beam:
   electron lithographer ZBA 21S with an electron energy of 20 keV (Vistec-Leica Microsystems Lithography), which enables the preparation of structures in the submicrometer area of ​​dimensions (minimum reproducible dimension 400 nm) on substrates with a diameter of up to 15 cm; electron lithographer ZBA 23 with an electron energy of 40 keV (Vistec-Leica Microsystems Lithography), which enables the preparation of structures in the submicrometer area of ​​dimensions (minimum reproducible dimension 200 nm) on substrates with a diameter of up to 18 cm.