Publications

researcher
Ing. Anna Benčurová

Publications for year 2026

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Publications

  • PREDANOCY, Martin - VUTOVA, Katia - BENČUROVÁ, Anna - KOLEVA, Elena - MANOILOV, Evgeniy - KOSTIČ, Ivan**. Study on patterns in electron beam lithography for sub-micrometer line gratings. In Industry 4.0, 2026, vol. 11, no. 4, p. 175-178. ISSN 2534-997X. Dostupné na internete: https://stumejournals.com/journals/i4/2026/4/175.full.pdf Typ: ADEB
  • PREDANOCY, Martin - VUTOVA, Katia - BENČUROVÁ, Anna - RITOMSKÝ, Mário - MANOILOV, Evgeniy - KOSTIČ, Ivan**. Comparative study of the negative resists AR-N 7520 and ma-N 2410 in electron beam lithography. In AIP Conference Proceedings, 2026, vol. 3455, art. no. 020005. (2025: 0.146 - SJR). ISSN 0094-243X. Dostupné na: https://doi.org/10.1063/5.0327396 (APCOM 2025 : International Conference on Applied Physics of Condensed Matter.) Typ: ADMB