Head of the Department: Ing. Mgr. Robert Andok, PhD.
Deputy: RNDr. Ivan. Kostič
The Department of Sensor Information Systems and Technologies was formed by merging the Department of Electron Beam Lithography and the Department of Sensor Systems. It combines extensive experience in micro- and nano-structure patterning using electron beam lithography with expertise in the field of sensor systems.
Research focus
- Development and application of advanced sensor systems, especially gas sensors (CO2, H2, etc.)
- Creation of microstructures and nanostructures using electron lithography
- Research into physical phenomena in electron lithography during the preparation of structures in thin layers in the sub-micrometer (150-900 nm) and nanometer (10-100 nm) range.
- Research into resist materials sensitive to electron radiation.
- Optimization of lithographic processes and correlation of subsequent technological processes such as plasma etching and thin film preparation using resist masks.
| STAFF |
| Ing. Mgr. Robert Andok, PhD. |
| MSc. Friday Ikechukwu Agu |
| Ing. Vladislav Barák |
| RNDr. Mária Bardošová, CSc. |
| Ing. Anna Benčurová |
| Ing. Štefan Havlík, DrSc. |
| prof. Ing. Ivan Hotový, DrSc. |
| Ing. Jaroslav Hricko, PhD. |
| Ing. Pavol Hrkút, CSc. |
| Ing. Jaromír Klarák. PhD. |
| Ing. Anatolii Kliuchka |
| Ing. Anna Konečníková |
| RNDr. Ivan Kostič |
| Ing. Pavol Nemec |
| Ing. Martin Predanocy, PhD. |
| Ing. Adrian Ritomský |
| Ing. Mário Ritomský |
| Ing. Jaroslava Škriniarová, CSc. |
| RNDr. Mária Bárdošová, CSc. |
| Our former colleagues: |
| Dipl.-Ing. Dr. Peter Hudek, Ing. Ladislav Matay, PhD., Ing. Igor Čaplovič, Ing. Pavol Písečný, PhD., RNDr. Mária Bardošová, CSc., RNDr. Miroslav Belov, PhD., Mgr. Jozef Bugár, Janka Capeková, Ing. Stanislav Fekete, Ing. Peter Kadlečík, Ing. Juraj Šmatlík, Ing. Alexander Bardoš, Ing. Ervín Barta, Ing. Ľuboš Štefaňák, Ing. Yanko Sarov, PhD., Ing. Roman Trebichavský |