Partners of the Electron beam lithography department
• Institute of Electrical Engineering, Slovak Academy of Sciences, Bratislava, Slovakia, www.elu.sav.sk. • Institute of Electronics and Photonics, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology in Bratislava, Slovakia, www.fei.stuba.sk. • Department of Experimental Physics, Fakulty of mathematics, physics and informatics, Comenius University in Bratislava, www.dep.fmph.uniba.sk • Institute of Electronics, Bulgarian Academy of Sciences, Sofia, Bulgaria, http://www.ie-bas.dir.bg/ • Institute of Microelectronics, NCSR Demokritos, Athens, Greece, www.imel.demokritos.gr • Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Poland. www.wemif.pwr.wroc.pl • Laboratoire de Physique des Matériaux et des Surfaces, Université de Cergy-Pontoise. Rue d’Eragny, Neuville sur Oise, 95 031 Cergy-Pontoise, http://lpms-cea.u-cergy.fr |