Department of Electron beam lithographyLeader: Ing. Mgr. Robert Andok, PhD. Deputy Leader: RNDr. I. Kostič |
Department of Electron Beam Lithography has many years practical experience in microstructures and nanostructures patterning based on electron beam lithography.The Department of Electron Beam Lithography has many years practical experience in microstructures and nanostructures patterning based on electron beam lithography.Research priority of the Department of EBL: Research in the field of methods concerning the preparation of nanometer structures based on electron beam for a wide range of applications associated with materials and nanotechnology research. Basic reseach themes: Research aim: |



STAFF |
Staff of the department of Electron beam lithography Leader: Ing. Mgr. R. Andok, PhD. |
Former colleagues: Ing. Ladislav Matay, PhD., Ing. Pavol Písecný, PhD., RNDr. Mária Bardošová, CSc., RNDr. Miroslav Belov, PhD., Mgr. Jozef Bugár, Janka Capeková, Ing. Stanislav Fekete, Ing. Peter Kadlečík, Ing. Juraj Šmatlík, Ing. Alexander Bardoš, Ing. Ervín Barta, Ing. Ľuboš Štefaňák, Ing. Roman Trebichavský |